Electrons in Lithography and Imaging for
Science and Application
Welcome reception 4 August 2026
Full conference days 5-7 August 2026
Reykjavik, Iceland
History and Vision
Aiming to strengthen the platform for foundation science on electron driven processes in patterning and imaging on the nanoscale, and its translation to applications, imec took an initiative in pulling together researcher and stakeholders in this field at a merged conference LE2AP+LEELIS 2024.
The LE2AP+LEELIS 2024 merged the communities of researchers from the MCS ITNs ELENA (low energy electron driven chemistry for the advantage of emerging nano-fabrication methods) and SIMDALEE2 (Sources, Interaction with Matter, Detection and Analysis of Low Energy Electrons), both focused on the physics and chemistry of electron driven processes in nanoscopic fabrication and imaging. Strengthening this imitative the long standing conference series LEELIS (Low-energy electrons: lithography, imaging and soft matter) joined – a conference series built on a strong tradition in understanding how electrons interact with matter, from their generation in photon‑, electron-, ion-, or atom-beam environments to their transport, absorption, and scattering in molecular systems, thin films, and photoresists and in imaging.
In parallel, the BEACON community (Beam Induced Nano-Manufacturing, formerly FEBIP) has pushed the frontiers from direct-write nanomanufacturing and localized modification towards functional 3D nano-printing through focused electron and ion beams, offering a collaborative platform with the long standing FEBIP conference series.
Now ELISA 2026 takes this a step further, uniting the long-standing and complementary LEELIS and BEACON communities, that have evolved around different yet deeply connected perspectives on electron-based science and technology.
With ELISA we seek to establish a lasting, bi-annual forum for the translation of the fundamental science of electron–matter interactions into practical fabrication strategies, enabling unique applications in materials science, micro-/nanoelectronics, and sensing.
By joining forces, ELISA 2026 bridges understanding and application over physics and chemistry, modelling, metrology and instrumentation. This fusion creates a broader and more integrated platform – one that connects fundamental insight with technological innovation, encourages collaboration across disciplines, and sets the stage towards new breakthroughs in lithography, imaging, and nanofabrication.